SUSS MicroTec AD12

Puddle Developer
Bank holiday 25 Dec Bay 05 Translational Research Hub
Internal name
AD12
Equipment managers
Tyrone Jones
Michael Lewis
Process types
Resist Coat and Develop
Description
SUSS MicroTec’s manual wet-processing system AD12 offers superior developing functions for aqueous media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm.
AD12 image