Bank holiday 25 Dec
Bay 11A Translational Research Hub
Internal name
ELPS01
Equipment manager
Saleem Shabbir
Process types
Metrology
Description
The Semilab SE-2000 is a modular spectroscopic ellipsometer for non-contact, non-destructive measurement of thin-film thickness, refractive index and optical constants. It covers a wide spectral range from deep-UV (around 190nm) through visible and near-IR on a single goniometer, suitable for single and multi-layer film stacks.