SUSS MicroTec HP8

Hot Plate
Bank holiday 25 Dec Bay 05 Translational Research Hub
Internal name
HP8
Equipment managers
Tyrone Jones
Michael Lewis
Process types
Resist Coat and Develop
Description
SUSS MicroTec HP8 programmable hotplate for photoresist soft-bake, post-exposure bake and hard-bake, part of the SUSS resist-processing line. Processes substrates up to 200mm (or 6 inch square) at temperatures up to 250C with high uniformity and repeatable ramps, with programmable multi-step recipes and optional nitrogen purge.
HP8 image