SUSS MicroTec MCS8

Hot Plate

Bank holiday 25 Dec Bay 05 Translational Research Hub

Internal name

MCS8 HP8 3.2

Equipment managers

Tyrone Jones

Michael Lewis

Process types

Resist Coat and Develop

Description

Programmable hotplate module (HP8) within the SUSS MicroTec MCS8 resist-processing cluster, handling substrates up to 200mm. Provides controlled, uniform soft-bake, post-exposure bake and hard-bake with recipe-set temperature and time. One of two hotplate modules in the MCS8 system (see HP8 3.1).