SUSS MicroTec MCS8

Adhesion Promoter

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Internal name

MCS8 VP8

Equipment managers

Tyrone Jones

Michael Lewis

Process types

Resist Coat and Develop

Description

Vapour-prime (adhesion promoter) module (VP8) in the SUSS MicroTec MCS8 cluster. Applies HMDS vapour prime to substrates up to 200mm to promote photoresist adhesion and improve pattern integrity ahead of coating, with a programmable process for consistent priming.