Bank holiday 25 Dec
Bay 11A Translational Research Hub
Internal name
MIC02 (Keyence)
Equipment manager
Elizabeth Beaumont
Process types
Metrology
Description
Keyence VHX-7100 4K digital microscope for high-magnification inspection, imaging and measurement of wafers, devices and cross-sections. A 12.2MP sensor with 20 to 6000x magnification gives large depth of field, with motorised stage control, image stitching, focus stacking and 3D profile extraction for 2D and 3D dimensional measurement.