Bank holiday 25 Dec
Shared ×2 Bay 05 Translational Research Hub
Internal name
Photoresist Wet Bench
Equipment managers
Tyrone Jones
Michael Lewis
Process types
Wet Processing
Description
A Felcon wet-processing bench dedicated to photoresist chemistry, providing fume-extracted, chemically resistant baths for resist develop and associated solvent handling, keeping resist-line chemistry segregated from other wet processes.