Raith Picomaster 200

Bank holiday 25 Dec Bay 04 Translational Research Hub

Internal name

Picomaster 200

Equipment managers

Tyrone Jones

Michael Lewis

Tom Peach

Process types

Optical Lithography

Description

Direct-write UV laser lithography system for high-resolution maskless patterning, developed by 4PICO and supplied by Raith. A 405nm laser exposes photosensitive layers with feature resolution down to around 230 to 300nm, and supports 12-bit greyscale exposure for 3D microstructures. Air-bearing XY stages handle substrates from 5 x 5mm up to 8 x 8 inch, suited to research and rapid prototyping.