Micromanipulator 450PM-B

Probe Station and SMU
Bank holiday 25 Dec Bay 14A Translational Research Hub
Internal name
PROBE01
Equipment managers
Tom Peach
Parco Wong
Process types
Metrology Packaging and Back End Processing
Description
Micromanipulator 450PM-B manual analytical probe station for on-wafer electrical characterisation, handling substrates up to 200mm on a vacuum chuck with full-wafer stage travel. Configurable for DC, RF and high-power measurements with a stable-boom microscope for precise probe positioning, paired with a source measure unit (SMU) for I-V and device testing.
PROBE01 image