Equipment Information

• Internal Name: PROF02 (KLA)

Description

Stylus-based scanning surface profiler. 2D/3D measurements of step height, roughness, waviness, bow and stress. Scans up to 200mm. Standard configuration: vertical range up to 1000µm and scanning forces of 0.5–50mg. Step heights measurable down to nm range. Filtering, levelling and analysis algorithms for quantifying surface topography. Pattern recognition, sequencing and feature detection for fully automated measurements.