KLA P17

Stylus-based scanning surface profiler for 2D and 3D measurement of step height, roughness, waviness, bow and stress. Scans up to 200mm with vertical range up to 1000um and scanning forces of 0.5 to 50mg, measuring step heights down to the nm range. Includes filtering, levelling and analysis algorithms, plus pattern recognition, sequencing and feature detection for fully automated measurements.