ECM Technologies JIPELEC JetFirst300

Rapid Thermal Annealer

Bank holiday 25 Dec Bay 13A Translational Research Hub

Internal name

RTA2

Equipment managers

Tyrone Jones

Saleem Shabbir

Process types

Thermal Processing

Description

Annealing of metal-semiconductor contacts over 300mm with a controlled N2 or O2 atmosphere. Thermocouple or pyrometer temperature control upto 1200 °C.