SUSS MicroTec SD12

Puddle Developer
Bank holiday 25 Dec Bay 06 Translational Research Hub
Internal name
SD12
Equipment managers
Tom Peach
Parco Wong
Process types
Resist Coat and Develop
Description
SUSS MicroTec’s manual wet-processing system SD12 offers superior cleaning and lift-off functions for solvent media applications. The single-wafer processing platform serves pieces, wafer sizes up to 300 mm, square substrates up to 230 x 230 mm and tape frames for wafers up to 300 mm. 
SD12 image