Hitachi SU8320 High Resolution

Scanning Electron Microscope
Maintenance 30 Nov Bay 11C Translational Research Hub
Internal name
SEM01
Equipment managers
Michael Lewis
Stuart Thomas
Process types
Metrology
Description
Hitachi SU8320 ultra-high-resolution cold field-emission scanning electron microscope (FE-SEM) for imaging fine surface structure at the nanoscale, with an in-lens detection system for high-quality low-voltage imaging. Fitted with a Bruker EDX system incorporating X-Flash and FlatQuad detectors for elemental microanalysis, including large-solid-angle analysis of rough or non-planar samples.
SEM01 image